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| Fluorocarbon resin is the solution to solve these problems |
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Washing Facilities
Elution Experiment Data
Metal Free Fluorocarbon Resin Coating
High Purity Fluorocarbon Resin Coating
NF-036SP prevents device contamination
caused by metal ion elution.
Experiment Outcome Using a Test Pot
Displayed at Exhibition
Unit: ppb
| Na |
Mg |
Al |
K |
Tl |
Cr |
Fe |
Ni |
Cu |
Zn |
| <0.5 |
<0.5 |
<0.5 |
<0.5 |
<0.5 |
<0.5 |
<0.5 |
<0.5 |
<0.5 |
<0.5 |
Film Thickness: 300 μm
Coating Specification: NF-036SP
Base Material: SUS304
Elution Test Conditions: 36％HCI, RT, 1 Week.
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Advantages in Adoption
･Reduction in surface adhesion of
contaminated materials.
･Less particle generation.
･Silicon wafer edge damage reduction. |
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Advantages in Adoption
･Excellent anti-corrosion property
against most chemicals regardless of
ph prevents contamination caused by corrosion.
･Enables device diversification. |
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Advantages in Adoption
･Prevents external contamination caused
by chemical permeation.
･Enables strength enhancement resulted
from metal tank usability.
･Enhances heat transfer efficiency. |
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Strength Enhancement of
Resin Molding Products
Advantages in Adoption
･Enables metal construction material usage.
･Enables to secure machine accuracy
in secondary processing.
･Compatible with parts that require
machinery strength. |
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CMP Device
Advantages in Adoption
･Prevents device deterioration caused by
corrosive fluids and corrosive atmosphere. |
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Exhaust Line
Advantages in Adoption
･Prevents corrosion caused by etching gas.
･Reduces adhesion of waste depositories.
･Enhances anti-plasma property. |
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