Saitama@2nd Plant
HQ Plant
Minami Rotary
Minami Standard
Fine Plant
Saitama 1st Clean
Saitama 1st Standard
Saitama 2nd Clean
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Clean Room |
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Clean Furnace |
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Size (W x H x D mm) |
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| Class 100,000 |
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1 furnace |
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1,000 x 1,000 x 1,000 |
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3 furnace |
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1,000 x 1,500 x 1,000 |
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4 furnace |
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1,600 x 1,800 x 1,600 |
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