Saitama 1st Plant
HQ Plant
Minami Rotary
Minami Standard
Fine Plant
Saitama 1st Clean
Saitama 1st Standard
Saitama 2nd Clean
|
 |
 |
 |
 |
 |
 |
 |
 |
|
Clean Room |
|
Clean Furnace |
|
Size (W x H x D mm) |
|
|
|
|
|
|
|
|
| Class 100,000 |
|
1 furnace |
|
1,600 x 1,600 x 1,600 |
|
|
|
|
|
|
|
1 furnace |
|
2,500 x 2,200 x 2,000 |
|
|
|
|
|
|
|
1 furnace |
|
2,000 x 3,300 x 3,500 |
|
|
|
|
|
|
|
|
|
Class 100,000 |
|
1 furnace |
|
4,800 x 1,150 x 1,500
Roll Furnace |
|
 |
|
|
|